Ukubekwa
Fumana ingqiqo kwaye ukhawulezise inkqubo yophuhliso.
Amandla aPhakamileyo anikezela ngobonelelo lwamandla kunye nezisombululo zolawulo lwezicelo zokubekwa kwefilim ecekethekileyo kunye neejometri zesixhobo.Ukusombulula imiceli mngeni yokusetyenzwa kwe-wafer, izisombululo zethu zoguqulo oluchanekileyo zikuvumela ukuba ukwandise ukuchaneka kwamandla, ukuchaneka, isantya, kunye nokuphindaphinda inkqubo.
Sinikezela ngoluhlu olubanzi lweefrikhwensi zeRF, iinkqubo zamandla eDC, amanqanaba emveliso yamandla alungelelanisiweyo, ubugcisa obuhambelanayo, kunye nezisombululo zokujongwa kobushushu befiber optic ezikwenza ukwazi ukulawula ngcono inkqubo yeplasma.Sikwadibanisa i-Fast DAQ™ kunye nokufunyanwa kwethu kwedatha kunye nesuite yokufikeleleka ukubonelela ngengqiqo yenkqubo kunye nokukhawulezisa inkqubo yophuhliso.
Funda ngakumbi malunga neenkqubo zethu zokuvelisa i-semiconductor ukufumana isisombululo esihambelana neemfuno zakho.
Umngeni wakho
Ukusuka kwiifilimu ezisetyenziselwa ukwenza ipatheni yemilinganiselo yesekethe edityanisiweyo ukuya kwiifilimu eziqhubayo kunye nezikhuselayo (izakhiwo zombane), ukuya kwiifilim zetsimbi (unxibelelwano), iinkqubo zakho zokubeka zifuna ulawulo lwenqanaba leathom - hayi kuphela kwinqaku ngalinye kodwa kuyo yonke iwafer.
Ngaphandle kolwakhiwo ngokwalo, iifilimu zakho ezifakiweyo kufuneka zibe kumgangatho ophezulu.Kufuneka babe nesakhiwo esinqwenelekayo sokutya okuziinkozo, ukufana, kunye nobukhulu obuhambelanayo, kwaye bangabikho-kwaye oko kukongeza ekuboneleleni ngoxinzelelo lomatshini (olucinezelayo kunye nokuqina) kunye neempawu zombane.
Ubunzima buqhubeka bukhula kuphela.Ukujongana nemida ye-lithography (i-sub-1X nm nodes), iindlela ezilungelelanisiweyo eziphindwe kabini kunye ne-quadruple zifuna inkqubo yakho yokubeka ukuvelisa kunye nokuvelisa ipateni kuyo yonke i-wafer.
Isisombululo sethu
Xa ubeka ezona zicelo zibalulekileyo zokubeka kunye neejiyometri zesixhobo, udinga inkokeli yentengiso ethembekileyo.
Unikezelo lwamandla eRF ye-RF yaMandla aPhakamileyo kunye nesantya esiphezulu sobuchwephesha obuhambelanayo bukwenza ukuba ulungelelanise kwaye ulungise ukuchaneka kwamandla, ukuchaneka, isantya, kunye nenkqubo ephindaphindwayo efunekayo kuzo zonke iinkqubo zokubeka i-PECVD kunye ne-PEALD.
Sebenzisa iteknoloji yethu ye-DC generator ukulungisa kakuhle impendulo yakho ye-arc elungelelanisiweyo, ukuchaneka kwamandla, isantya, kunye nenkqubo ephindaphindayo efunekayo yePVD (i-sputtering) kunye neenkqubo zokubeka i-ECD.
Iingenelo
● Uzinzo oluphuculweyo lweplasma kunye nokuphindaphinda kwenkqubo kwandisa isivuno
● Unikezelo oluchanekileyo lwe-RF kunye ne-DC kunye nolawulo olupheleleyo lwedijithali lunceda ukwandisa ukusebenza kakuhle kwenkqubo
● Ukuphendula ngokukhawuleza kwiinguqu zeplasma kunye nolawulo lwe-arc
● I-pulsing enamanqanaba amaninzi kunye ne-adaptive frequency tuning iphucula ukukhethwa kwereyithi yezinga
● Inkxaso yehlabathi ekhoyo ukuqinisekisa ixesha eliphezulu kunye nokusebenza kwemveliso