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MSB Series Medium Frequency Sputtering Power Supply

Inkcazelo emfutshane:

Uthotho lwe-RHH Ubonelelo lwamandla e-RF luxhomekeke kubuchwepheshe bokuvelisa i-RF ukubonelela abathengi ngobonelelo lwamandla eRF ngamandla amakhulu, uchaneke ophezulu kunye nokuphendula ngokukhawuleza.Ngesigaba sinokusetwa, i-pulse controllable, ukulungiswa kwedijithali kunye neminye imisebenzi.Imimandla esebenzayo: i-photovoltaic industry, i-flat panel display industry, i-semiconductor industry, i-chemical industry, i-laboratory, uphando lwezenzululwazi, ukuvelisa, njl.

Iinkqubo ezisebenzayo: i-plasma iphuculwe i-chemical vapor deposition (PECVD), i-plasma etching, i-plasma yokucoca, umthombo we-ion frequency radio, i-plasma diffusion, i-plasma polymerization sputtering, i-sputtering esebenzayo, njl.


Iinkcukacha zeMveliso

Iithegi zeMveliso

Thumela i-imeyile kuthi

Iimbonakalo

● Izitena ezinesiqingatha kunye neendlela zokubeka i-rack

● Yamkela ulawulo olupheleleyo lwedijithali, kunye nemenyu yokusebenza efanelekileyo netyebileyo

● Ulungelelwaniso lwamaxesha, ukubetha kwentliziyo kunye nongqamaniso lwepulse

● Ngomsebenzi wongqamaniso lwesigaba se-CEX

● Umsebenzi wokukhusela ogqibeleleyo

Iinkcukacha zeMveliso

Igalelo Umbane wokungenisa: AC220V±10% 3ΦAC380V±5%(Iinkcukacha ezikhethekileyo zinokwenziwa ngokwezifiso)
Ubuninzi begalelo: 47 ~ 63Hz
Isiphumo Ubuninzi bemveliso: 13.56MHz, 27.12MHz, 40.68MHz
Uluhlu lweTuning: ±5%
Amandla emveliso: 1.5 ~ 5kW
Uluhlu lolawulo lwamandla emveliso: 1 ~ 100%
Uthintelo lwemveliso: 50Ω+j0
Ujongano lwemveliso: uhlobo N
Imo yemveliso: ngokuqhubekayo, i-pulse
I-Pulse frequency: 100Hz ~ 100kHz
Umjikelo womsebenzi: 5 ~ 95%
Isalathiso sokusebenza Umba wamandla: 0.98
Ukuchaneka kozinzo rhoqo: ±0.005%
Ukusebenza kakuhle: 75% (kwisiphumo esilinganisiweyo)
IHarmonic: <-45dBc
Lahleka: <-50dBc
Ujongano lolawulo lwangaphandle: ubungakanani be-analog, unxibelelwano kunye nongqamaniso
Imo yonxibelelwano: Ujongano lonxibelelwano olusemgangathweni lweRS485;Ukhetho lwe-Etere CAT, i-Ethernet yoshishino, njl.
Qaphela: imveliso iyaqhubeka nokwenza izinto ezintsha kwaye ukusebenza kuyaqhubeka nokuphucula.Le nkcazo yepharamitha yeyereferensi kuphela.


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