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MSB Series Medium Frequency Sputtering Power Supply

Inkcazelo emfutshane:

Uthotho lwe-MSB luxhomekeke kwitekhnoloji ebalaseleyo yokumodareyitha itekhnoloji kwimveliso yeDC, i-DC pulse, i-bidirectional square wave, i-bidirectional trapezoidal wave kunye nolunye uhlobo lwamaza.Imveliso ine-adjustable output waveform, i-electable output frequency, adjustable duty cycle, kunye nolawulo lwamandla oluchanekileyo.Kanye nokugcinwa kwamandla aphantsi kunye nokuphendula ngokukhawuleza kwe-arc.Ukubonelela ngolawulo olufanelekileyo kunye noluchanekileyo lwenkqubo yokwaleka.Iimveliso zisetyenziswa ikakhulu kwiinkqubo ezahlukeneyo zokwenziwa kwefilimu, ishishini leeseli zelanga, kunye neshishini lokugquma;iinkqubo zesicelo: inkqubo ye-magnetron sputtering, i-twin target sputtering, kunye ne-PECVD ye-tubular.


Iinkcukacha zeMveliso

Iithegi zeMveliso

Thumela i-imeyile kuthi

Iimbonakalo

Ukufakwa kweRakhi
Ukuphendula ngokukhawuleza kwe-arc, ixesha lokuphendula<100ns
Ukugcinwa kwamandla aphantsi, <0.5mJ/ KW
Itekhnoloji ye-PFC ye-multi-phase interleaved, into yamandla iphezulu njenge-0.95
Iimowudi zemveliso ezahlukeneyo, iindlela eziqhubekayo kunye nezangaphakathi zinokukhethwa
Isekethe ye-Inverter isebenzisa itekhnoloji yokutshintsha okuthambileyo ngokupheleleyo kwaye isebenzisa isizukulwana sesithathu semiconductor SiC njengesixhobo samandla, ngokusebenza okugqwesileyo.
Ukufunyanwa kwe-arc ngokuchanekileyo, iindlela ezininzi zokubeka iliso ezikhoyo

Iinkcukacha zeMveliso

Isalathiso MSB1040(20*2) MSB1030

 

Igalelo
Igalelo lombane

 

3AC400V, 50/60Hz

 

3AC400V, 50/60Hz

 

Inqanaba lamandla

 

20kW

 

30kw

 

Iimowudi zemveliso

 

2 itshaneli

 

Ijelo eli-1

 

Isiphumo
Ubuninzi bemveliso yangoku

 

50A*2

 

80A

 

Ubuninzi bemveliso yombane

 

600V*2

 

600V

 

Iimpawu zobugcisa
Amandla factor

 

0.95

 

0.95

 

Uguqulo olusebenzayo

 

94% Phantsi kobume bokulinganisa 94% Phantsi kobume bokulinganisa
Ukulungelelanisa ukuchaneka

 

±0.5%

 

±0.5%

 

Ixesha lokuphendula leArc

 

<100ns

 

<100ns

 

Ubungakanani

 

4U

 

4U

 

Unxibelelwano

 

Standard RS485/RS232(Profibus、Profinet、DeviceNET、EtherCAT ngokuzikhethela)


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