Iyakwazi ukulungelelaniswa kuluhlu lwe-RLS unikezelo lwamandla lwe-RF, kwaye lusetyenziswa ngokubanzi kwi-plasma etching, i-coating, ukucoca i-plasma, i-plasma degumming kunye nezinye iinkqubo.Xa isetyenziswa iyodwa, inokusetyenziswa kunye nabanye abavelisi bombane beRF.