Umlawuli wamandla wechungechunge lwe-TPM5 wamkela ingcamango yoyilo lwemodyuli kwaye idibanisa ukuya kwiisekethe ezi-6 ngaphakathi.Iimveliso zisetyenziswa kakhulu kwii-furnaces zokusasaza, i-PECVD, ii-epitaxy furnaces, njl.